BPF-600 6" Probe Station探针台 (产品编号:BPF-600)
| BPF-600 box底座(570mm深x660mm宽x800mm高);6”wafer stainless vacuum chuck |
| Vacuum on-off switch to control each vacuum ring |
| Chuck X-Y stage distance 6”x6”;Chuck theta rotation 0°～360° manual |
| Platen固定不动;Microscope mount x-y travel 2”x2”(Mount 固定不动) |
| Fast pull-out Y stage for easy loading/unloading sample |