BPF-600 6" Probe Station探針台 (產品編號:BPF-600)
| BPF-600 box底座(570mm深x660mm寬x800mm高);6”wafer stainless vacuum chuck |
| Vacuum on-off switch to control each vacuum ring |
| Chuck X-Y stage distance 6”x6”;Chuck theta rotation 0°～360° manual |
| Platen固定不動;Microscope mount x-y travel 2”x2”(Mount 固定不動) |
| Fast pull-out Y stage for easy loading/unloading sample |