BPE-400 4" Probe Station探针台 (产品编号:BPE-400)

specification:
1.4" wafer stainless vacuum chuck
2.chuck x-y stage行程101.6mmx101.6mm ring
3.Chuck theta rotation 0°～360° manual微调
4.Platen U型固定不动
5.chuck x-y stage最小移动距离2 um
6.chuck 面积4"卡盘平整度:5 um
7.Box底座尺寸(450mm长x320mm宽x50mm高)