BPE-600 6" Probe Station探针台 (产品编号:BPE-600)

specification:
1.6" Wafer stainless Vacuum chuck
2.Chuck x-y stage行程101.6mmx101.6mm ring(4"x4")
3.Chuck theta rotation 0°～360° manual微调
4.Platen U型固定不动
5.Chuck x-y stage最小移动距离2um
6.Chuck 面积6"卡盘平整度:5um
7.Box底座尺寸(450mm长x320mm宽x50mm高)