BPN-600 Probe Station探针台 (产品编号:BPN-600)

Specification:
1.6" Wafer stainless vacuum chuck
2.Chuck x-y Stage行程101.6mm x101.6mm
3.Chuck theta rotation 0°～360° manual微调
4.Platen U型固定不动
5.Chuck x-y stage最小移动距离≤ ５um
6.Chuck 面积6"卡盘平整度≤ 5um
7.Box底座尺寸(450mm长x320mm宽x50mm高)