BPW-1200 12" Probe Station探针台 (产品编号BPW-1200)
Specification:
1.12” wafer stainless vacuum chuck(hot chuck)
2.Vacuum on-off switch to control each vacuum ring
3.Chuck X-Y stage distance 12”x12”
4.Chuck theta rotation manual
5.Platen 微调up-down 25mm解析10 µm
6.Platen quick up-down
7.Microscope Z轴气动快速升降 for easy loading/unloading sample
8.Microscope mount x-y travel 2”x2”
9.X-Y Stage气动快速移动及微调线性移动
10.Heavy and stable bench base
11.Upgrade:CCD ,Laser System,Hot Chuck,防震桌,Shielding Box
1.12” wafer stainless vacuum chuck(hot chuck)
2.Vacuum on-off switch to control each vacuum ring
3.Chuck X-Y stage distance 12”x12”
4.Chuck theta rotation manual
5.Platen 微调up-down 25mm解析10 µm
6.Platen quick up-down
7.Microscope Z轴气动快速升降 for easy loading/unloading sample
8.Microscope mount x-y travel 2”x2”
9.X-Y Stage气动快速移动及微调线性移动
10.Heavy and stable bench base
11.Upgrade:CCD ,Laser System,Hot Chuck,防震桌,Shielding Box