BPW-1200 12" Probe Station探針台 (產品編號BPW-1200)
Specification:
1.12” wafer stainless vacuum chuck(hot chuck)
2.Vacuum on-off switch to control each vacuum ring
3.Chuck X-Y stage distance 12”x12”
4.Chuck theta rotation manual
5.Platen 微調up-down 25mm解析10 µm
6.Platen quick up-down
7.Microscope Z軸氣動快速升降 for easy loading/unloading sample
8.Microscope mount x-y travel 2”x2”
9.X-Y Stage氣動快速移動及微調線性移動
10.Heavy and stable bench base
11.Upgrade:CCD ,Laser System,Hot Chuck,防震桌,Shielding Box
1.12” wafer stainless vacuum chuck(hot chuck)
2.Vacuum on-off switch to control each vacuum ring
3.Chuck X-Y stage distance 12”x12”
4.Chuck theta rotation manual
5.Platen 微調up-down 25mm解析10 µm
6.Platen quick up-down
7.Microscope Z軸氣動快速升降 for easy loading/unloading sample
8.Microscope mount x-y travel 2”x2”
9.X-Y Stage氣動快速移動及微調線性移動
10.Heavy and stable bench base
11.Upgrade:CCD ,Laser System,Hot Chuck,防震桌,Shielding Box