貝斯科技股份有限公司

Specification:

1.BPW-800-N ;8”wafer stainless vacuum chuck
2.Vacuum on-off switch to control each vacuum ring
3.Chuck X-Y stage distance 8”x8”
4.Chuck theta rotation 0°～360° manual
5.Platen up-down 20mm
6.Platen quick up-down
7.Fast pull-out Y stage for easy loading/unloading sample
8.Microscope mount x-y travel 2”x2”
9.Heavy and stable bench base
10.顯微鏡氣動升降