貝斯科技股份有限公司

產品

100吋 LCD Probe Station

電洽

■Specification
Dimension: 2800mm寬x2500mm深x1700mm高
Weight: 4500 Kg
Power: 220V 60Hz 三相
Air Require:5.5 Kpa
Microscope Linear Z Pneumatic: 0~100 mm
Vibration Isolator x4(採用主動式防震系統)
背光分成4區控制,照度> 5000 Lux
X軸線碼控制
量測精度:(X軸Y軸)4+L/10) μm
X--Y-Z軸解析+- 1 μm
X--Y-Z軸重複定位精度+- 10μm                                                                                                                                                   
■Feature
機台採用花崗岩座機底,Base厚度達20cm,總重達4.5頓;為一非常穩固Stable之設計
針座 Stage在移動軸,設有一Lock鈕,當User做長時間量測時,可lock住stage,以防止非相關人員誤動作
MicroScope採用高解析度(日本原裝Mitutoyo) 及超長工作距離之顯微鏡,而Scope Mount採用龍門架橋方式設計,
方便User Switching Objective;背光分成4區控制,照度> 5000 Lux                                                                                                                                                                                    
Microscope Mitutoyo(光學系統)
Eyepiece 10X
M Plan Apo Objective 5X
M Plan Apo Objective 10X
NIR20X
NUV50X
Total Magnification:500 x
Pupil distance:adjustment range 51-76mm
Platen x2 Leftx1 Rightx1                                                                                                                                                                             
Laser System(雷射修補系統)
型號:NewWave EzLaze3
YAG Laser cutting System
Laser 波長  (1064/532/355 nm)
Pulse
Width:0.6mJ