產品
BPA-800 8" Probe Station探針台 (產品編號:BPA-800)
電洽
Specification:
1.8” Wafer stainless vacuum chuck(Hot chuck)
2.Vacuum on-off switch to control each vacuum ring
3.Chuck X-Y stage distance 8”x8”
4.Chuck theta rotation 0°~360° manual
5.Platen up-down 20mm
6.Platen quick up-down
7.Fast pull-out Y stage for easy loading/unloading sample
8.Microscope mount x-y travel 2”x2”
9.Box底座(660mm長x570mm寬x80mm高)
10.Heavy and stable bench base
11.顯微鏡頃仰裝置,角度30度,並帶自動鎖死功能
12.搭配立體顯微鏡(Stereo Microscope:Total Magnification 30x~195x)